World number two Sharapova booked her place in the final of the women's event with a 4-6 6-2 6-4 victory in a topsy-turvy match against fourth seed Wozniacki.
Sharapova raced into a 4-1 lead, before Wozniacki rallied to win five games in a row, taking the first set.
But the Dane barely got a look in in the second as Sharapova raised her game, making 92% of first serves as two breaks handed her the set in convincing fashion.
And the former Wimbledon champion broke twice more in the decider to take victory.
Sharapova told www.sonyericssonopen.com: "I'm really pleased that after losing that first one, being up and playing really well and then backing off and her stepping up, I could have easily just [have gone] down in the second set.
"But I really stepped it up again. I went out there and started being aggressive. I didn't stop after I put myself in a good position. I'm extremely pleased that I pulled it out today [Thursday]."
Sharapova will face fifth seed Agnieszka Radwanska in the final after the Pole beat Marion Bartoli 6-4 6-2 in the second semi.
French seventh seed Bartoli could not repeat the heroics of her semi-final victory over world number one Victoria Azarenka, whose 26-match winning run she ended on Thursday.